Fully integration of an innovative pressure sensor platform

  1. Herrán, J.
  2. Fernández, I.
  3. Ochoteco, E.
  4. Cabañero, G.
  5. Grande, H.
  6. Flores, A.
  7. Copaci, D.
  8. Blanco, D.
  9. Moreno, L.
Proceedings:
Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014

ISBN: 9783863592011

Year of publication: 2014

Pages: 199-206

Type: Conference paper