Positron annihilation spectroscopy for the determination of thickness and defect profile in thin semiconductor layers
- Zubiaga, A.
- García, J.A.
- Plazaola, F.
- Tuomisto, F.
- Zúñiga-Pérez, J.
- Muñoz-Sanjosé, V.
ISSN: 1098-0121, 1550-235X
Year of publication: 2007
Volume: 75
Issue: 20
Type: Article